| LEADER : 00000nam 2200000uu 4500 |
| 008 110918s1985th m 000 0 tha d |
| 020 ^a0841209405 |
| 040 ^aneu |
| 041 0 ^aEng |
| 082 0 ^a621.381^bI61 1985 |
| 245 10 ^aIntegrated circuits :^bchemical and physical processing /^cPieter Stroeve, editor. |
| 260 ^aWashington, D.C. :^bAmerican Chemical Society,^cc1985. |
| 300 ^aix, 348 p. :^bill. ;^c24 cm. |
| 440 0 ^aACS symposium series ;^v290. |
| 500 ^adeveloped from the winter symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis,March 26-27, 1984 |
| 650 0 ^aIntegrated circuits^xVery large scale integration^xDesign and construction^vCongresses. |
| 700 1 ^aStroeve, Pieter,^d1945- ,^eed |
| 700 1 ^aAmerican Chemical Society |
| 852 ^aElectronics Engineering |
| 999 ^a Ananya |
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