| LEADER : 00000nam 2200000uu 4500 |
| 008 110921s1989th m 000 0 tha d |
| 020 ^a0841214751 |
| 040 ^aneu |
| 041 0 ^aEng |
| 082 0 ^a621.381^bM626 1989 |
| 245 10 ^aMicroelectronics processing :^bchemical engineering aspects /^cDennis W. Hess, editor, Klavs F. Jensen, editor. |
| 260 ^aWashington, DC :^bAmerican Chemical Society,^cc1989. |
| 300 ^axiv, 547 :^bill. ;^c23 cm. |
| 440 0 ^avances in chemistry series ;^v221. |
| 650 0 ^aMicroelectronics^xMaterials. |
| 650 0 ^aIntegrated circuits^xDesign and construction. |
| 650 0 ^aSurface chemistry. |
| 700 1 ^aHess, Dennis W.,^eed. |
| 700 1 ^aJensen, Klavs F.,^d1952-,^eed. |
| 710 1 ^aAmeican Chemical Society |
| 852 ^aElectronics engineering |
| 999 ^a Ananya |
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