LEADER : 00000nam 2200000uu 4500 |
008 110923s1995th m 000 0 tha d |
020 ^a0841233322 |
040 ^aneu |
041 ^aEng |
082 0 ^a621.381^bM626 1995 |
245 10 ^aMicroelectronics technology :^bpolymers for advanced imaging and packaging /^cElsa Reichmanis ... [et al.], editor. |
260 ^aWashington, D.C. :^bAmerican Chemical Society,^cc1995. |
300 ^a xii, 563 p. :^bill. ;^c24 cm. |
440 0 ^aACS symposium series ;^v614. |
500 ^a"Developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., andthe Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995". |
650 0 ^aMicroelectronic packaging^xMaterials^vCongresses. |
650 0 ^aPolymers^vCongresses. |
650 0 ^aPhotoresists^vCongresses. |
700 1 ^aReichmanis, Elsa,^d1953-,^eed. |
700 1 ^aAmerican Chemical Society |
700 1 ^aAmerican Chemical Society.^bMeeting^n(209th :^d1995 :^cAnaheim, Calif.) |
852 ^aElectronics engineering |
999 ^a Ananya |